Tabletop wafer transfer device
Introducing a device that supports 6.8-inch SEMI standard wafers and allows for the selection of basic transfer patterns!
This product is a device that can accommodate both standard pitch cassettes and double pitch cassettes, allowing for interchange between them. The basic transfer patterns include options for same slot transfer, inverted slot transfer, and designated slot transfer. Additionally, as an option, it is possible to equip a slot designation recipe and a wafer ID reader. 【Features】 ■ Compatible with 6.8-inch SEMI standard wafers ■ Supports both standard pitch cassettes and double pitch cassettes ■ Allows for interchange between them ■ Optionally equipped with a slot designation recipe and a wafer ID reader *For more details, please refer to the PDF document or feel free to contact us.
- Company：アテル
- Price：Other
